Title

Journal

submitted to Appl. Phys. Lett. (2003)

Mat. Res. Soc. Symp. Proceeding, accepted.

Mat. Res. Soc. Symp. Proceeding, accepted.

Integrated Ferroelectrics, in press.

Integrated Ferroelectrics, in press.

Appl. Phys. Lett. In press.

Jpn. J. Appl. Phys., in press.

Appl. Phys. Lett., 83(14), 2880 (2003)

Jpn. J. Appl. Phys., Vol. 42 (Part 1, No. 9B), 5952 (2003)

55

Jpn. J. Appl. Phys., Vol. 42 (Part 1, No. 9B), 5956 (2003)

54

Seung-Hyun Kim, Chang Young Koo, letter-spacing:0; Dong-Yeon Park, Dong-Su Lee, Jung-Hoon Yeom, Jieun Lim Cheol Seong Hwang,  and Jowoong Ha, "Scaling Issues of Pb(Zr,Ti)O3 Capacitor Stack for High Density FeRAM Devices"

J. Kor. Phys. Soc., Vol. 42, S1417 (2003)

53

Seung-Hyun Kim, Jeong-Suong Yang, Chang Young Koo, Jung-Hoon Yeom, Dong-Su Lee,  Cheol Seong Hwang, Kyu-Ho Hwang, and Jowoong Ha, "Electromechanical Properties of  Pb(Zr,Ti)O3 Films for MEMS Applications"

J. Kor. Phys. Soc., Vol. 42, S1101 (2003)

52

J. Electrochem. Soc., Vol. 150, No. 10, C678 (2003)

51

Seung-Hyun Kim, Chang Young Koo, Su-Min Ha, Hyun-Jung Woo, Dong-Yeon Park, Jieun Lim, Cheol Seong Hwang, and Jowoong Ha, "Thickness scaling of Pb(Zr,Ti)O3 thin films and Pt electrodes for high density FeRAM devices"

Integrated Ferroelectrics, Vol. 48, 139 (2003)

50

Dong-Su Lee, Hyun-Jung Woo, Dong-Yeon Park, Jowoong Ha, Cheol Seong Hwang, and Euijoon Yoon, "Effects of the microstructure of platinum electrode on the oxidation behavior of TiN diffusion barrier layer"

Jpn. J. Appl. Phys., 42 (Part 1, No. 2A), 630 (2003).

49

Jieun Lim, Dong-Yeon Park, Jae Kyoung Jung, Gregor Darlinski, Hyeong Joon Kim, Cheol Seong Hwang, Seung-Hyun Kim, Chang Young Koo, Hyun-Jung Woo, Dong-Su Lee and Jowoong Ha, "Dependence of ferroelectric performance of sol-gel derived Pb(Zr,Ti)O3 thin films on bottom-Pt-electrode thickness"

  Appl. Phys. Lett.,3224 (2002).

48

Seung-Hyun Kim, Dong-Yeon Park, Hyun-Jung Woo, Dong-Su Lee, Jowoong Ha, Cheol Seong Hwang, In-Bo Shim, and A.I. Kingon, "Orientation effects in chemical solution derived Pb(Zr0.3,Ti0.7)O3 thin films on ferroelectric properties"

  Thin Solid Films, 416, 264 (2002).

47

Á¶±Ý¼®, ÀÓÁöÀº, ±Ç¿À¼º, Ȳö¼º / ±è½ÂÇö, À̵¿¼ö "°­À¯Àüü¹Ú¸· CapacitorÀÇ °­À¯Àü Ư¼º Æò°¡"

¼¼¶ó¹Ì½ºÆ®, 5      (4), 80(2002).

46

Seung-Hyun Kim, Hyun-Jung Woo, Chang Young Koo, Jeong Suong Yang, Su-Min Ha, Dong-Yeon Park, Dong-Su Lee and Jowoong Ha, "Effects of heterostructure electrodes on the reliability of ferroelectric PZT thin films"

J. Korean Ceram. Soc., 39(4), 341 (2002).

45

Jin Shi-Zhao, Ji Eun Lim, Seehwa Chung, Moon Joo Cho, Cheol Seong Hwang and Seung-Hyun Kim, "Heat-treatment induced ferroelectric fatigue of Pt/Sr1-xBi2+yTa2O9/Pt thin-film capacitors"

Appl. Phys. Lett., 81(8), (2002).

44

Seung-Hyun Kim, Dong-Yeon Park, Hyun-Jung Woo, Dong-Su Lee, Jowoong Ha, and Cheol Seong Hwang, "The effects of IrO2/Pt hybrid electrodes on the crystallization and ferroelectric performances of sol-gel-derived Pb(Zr,Ti)O3 thin film capacitors"

J. Mater. Res., 17(7), 1735 (2002).

43

J-P. Maria, K. Cheek, S.K. Streiffer, Seung-Hyun Kim, G. Dunn and A.I. Kingon, "Lead Zirconate Titanate thin films on base-metal foils; An approach for embedded high K passive components"

J. Am. Ceram. Soc., 84, 2436 (2001).

42

S.F. Karmanenko, A.I. Dedyk, A.A. Melkov, R.N. Il'in, V.I. Sakharov, I.T. Serenkov and Jowoong Ha, "Structural features and phase transition temperature of BaxSr1-xTiO3 films grown on various substrates"

J. Phys.:
Condens. Matter, 13, 1 (2001).

41

Seung-Hyun Kim, Dong-Yeon Park, Hyun-Jung Woo, Dong-Su Lee, Jowoong Ha, Cheol Seong Hwang, Seehwa Jeong and Angus I. Kingon, "The low-voltage-switching behavior of sol-gel-derived Pb(Zr,Ti)O3 thin film capacitors"

Integrated Ferroelectrics,
39, 13 (2001).

40

Seung-Hyun Kim, Hyun-Jung Woo, Chang-Young Koo, Dong-Su Lee, and Jowoong Ha, "Ferroelectric fatigue in sol-gel derived Pb(Zr0.40Ti0.60)O3 thin films having Pt bottom and PtOx top electrodes"

submitted to
Appl. Phys. Lett.

39

Seung-Hyun Kim, Jowoong Ha, Cheol Seong Hwang, and Angus I. Kingon, "Ca- and Sr-doped (Pb1-xLax)(ZryTi1-y)1-x/4O3 thin films for low-voltage operation"

Thin Solid Films, 394, 131 (2001).

38

Jowoong Ha, Dong-Yeon Park, Hyun-Jung Woo, Seung-Hyun Kim, and Dong-Su Lee, "Effects of electrodes on the electrical properties of ferroelectric devices"

CSJ, 7, 55 (2001).

37

Seung-Hyun Kim, Hyun-Jung Woo, Jowoong Ha, Cheol Seong Hwang, Hae Ryoung Kim, and Angus I. Kingon, "Thickness effects on imprint in chemical-solution-derived (Pb,La)(Zr,Ti)O3 thin films"

Appl. Phys. Lett., 78(19), (2001).

36

Dong-Su Lee, Dong-Yeon Park, Hyun-Jung Woo, Seung-Hyun Kim, Jowoong Ha, and Euijoon Yoon, "Preferred orientation controlled giant grain growth of platinum thin films on amorphous substrates"

  Jpn. J. Appl. Phys., 40 (Part 2, No. 1A/B), L1 (2001).

35

Soon-Gil Yoon, Dwi Wicaksana, Dong-Joo Kim, Seung-Hyun Kim, and A.I.Kingon, "Effect of hydrogen on (Pb,La)(Zr,Ti)O3 (PLZT) thin film capacitors with Pt or Ir-based top electrodes"

Proceedings of 12th ISAF,
 949 (2000).

34

Soon-Gil Yoon, A.I. Kingon, and Seung-Hyun Kim, "Relaxation and leakage current characteristics of Pb1-xLax(ZryTi1-y)1-x/4O3 thin films with various Ir-based top electrodes"

J. Appl. Phys., 88(11), 6690 (2000).

33

Seung-Hyun Kim, Dong-Su Lee, Cheol Seong Hwang, Dong-Joo Kim, and A.I. Kingon, "Thermally induced voltage offsets in Pb(Zr,Ti)O3 thin films"

Appl. Phys. Lett., 77(19), 3036 (2000).

32

Seung-Hyun Kim, D-J. Kim, J-P. Maria, S. K. Streiffer, J. Im, O. Auciello, A. R. Krauss, and A.I. Kingon, "Influence of Pt heterostructure bottom electrodes on SrBi2Ta2O9 thin film properties"

Appl. Phys. Lett., 76(4), 496 (2000).

31

Chang Young Koo, and H.Y. Lee, "Ferroelectric Sr2(Nb,Ta)2O7 thin films prepared by chemical solution deposition technique"

  Jpn. J. Appl. Phys., 37 (Part 1, No. 9), 5521 (2000).

30

Seung-Hyun Kim, D-J. Kim, K. M. Lee, M. Park, A. I. Kingon, R. J. Nemanich, J. Im, and S.K. Streiffer, "An optimized process for fabrication of SrBi2Ta2O9 thin films using a novel chemical solution deposition technique"

J. Mater. Res., 14(11), 4395 (1999).

29

Seung-Hyun Kim, D-J. Kim, S.K. Streiffer, and A.I. Kingon, "Preparation and ferroelectric properties of mixed composition layered PZT thin films for non-volitile memory applications"

  J. Mater. Res., 14(6), 2476 (1999).

28

Seung-Hyun Kim, D-J. Kim, J.G. Hong, S.K. Streiffer, and A.I. Kingon, "Imprint and fatigue properties of chemical solution derived Pb1-xLa(ZryTi1-y)1-x/4O3 thin films"

  J. Mater. Res., 14(4), 1371 (1999).

27

Min Hong Kim, Tae-Soon Park, Euijoon Yoon, Dong-Su Lee, Dong-Yeon Park, Hyun-Jung Woo, Dong-Il Chun, and Jowoong Ha, "Changes in preferred orientation of Pt thin films deposited by DC magnetron sputtering using Ar/O2 gas mixtures"

J. Mater. Res., 14(4), 1255 (1999).

26

Seung-Hyun Kim, J.G. Hong, S.K. Streiffer, and A.I. Kingon, "The effect of RuO2/Pt hybrid bottom electrode structure on the leakage and fatigue properties of chemical solution derived Pb(ZrxTi1-x)O3 thin films"

J. Mater. Res., 14(3), 1018 (1999).

25

Min Hong Kim, Tae-Soon Park, Dong-Su Lee, Euijoon Yoon, Dong-Yeon Park, Hyun-Jung Woo, Dong-Il Chun, and Jowoong Ha, "Highly (200)-oriented Pt films on SiO2/Si substrates by seed selection through amorphization and controlled grain growth"

  J. Mater. Res., 14(3), 634 (1999).

24

J. Im, O. Auciello, A.R. Krauss, D.M Gruen, R.P.H. Chang, Seung-Hyun Kim, A.I. Kingon, "Studies of hydrogen-induced degradation processes in SBT ferroelectrics film-based capacitors using in-situ time of flight masses spectroscopy of recoiled ions"

Appl. Phys. Lett., 74(8), 1162 (1999).

23

Y.S. Ahn, D.S. Lee, E J. Ahn, and E. Yoon, "Deposition of PbTiO3 thin films by reactive sputtering"

Çѱ¹Áø°øÇÐȸÁö, 3 (2), 126 (1999).

22

H. Maiwa, J.A. Christman,  Seung-Hyun Kim, D-J. Kim, J-P. Maria, B. Chen, S.K. Streiffer, and A.I. Kingon, "Measurement of piezoelectric displacement of PZT thin films using a Double-Beam Interferometer"

  Jpn. J. Appl. Phys., 38 (Part 1, No. 9B), 5402 (1999).

21

Seung-Hyun Kim, D-J. Kim, J. Im, C.E. Kim, and A.I Kingon, "Ferroelectric properties of new chemical solution derived SBT thin films for non-volatile memory devices"

J. Sol-Gel Sci. and Tech., 16(1/2),   57 (1999).

20

Seung-Hyun Kim, D-J. Kim, J-P. Maria, J. Im, S.K. Streiffer, and A.I. Kingon, "Impact of changes in the Pt heterostructure bottom electrodes on the ferroelectric SBT thin film properties"

 Integrated Ferroelectrics , 26, 253 (1999).

19

D-J. Kim, Seung-Hyun Kim, J-P. Maria, and A.I. Kingon, "Influence on imprint failure of SrBi2Ta2O9 thin film capacitors"

 Integrated Ferroelectrics , 25, 351 (1999).

18

H. Maiwa, J-P. Maria, J.A. Christman, Seung-Hyun Kim, S.K. Streiffer, and A.I. Kingon, "Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients"

 Integrated Ferroelectrics , 24, 139 (1999).

17

J.A Christman, H. Maiwa, Seung-Hyun Kim, A.I. Kingon, and R.J. Nemanich, "Piezoelectric measurements with atomic force microscopy"

  Mat. Res. Soc. Symp. Proc., 541, 617 (1999).

16

D-J. Kim, Seung-Hyun Kim, J-P. Maria, and A.I. Kingon, "Thermally induced imprint of PZT and SBT thin films"

  Mat. Res. Soc. Symp. Proc., 541, 469 (1999).

15

J. Im, O. Auciello, A.R. Krauss, D.M. Gruen, R.P.H. Chang, Seung-Hyun Kim, and A.I. Kingon, "In situ mass spectroscopy of recoiled ion studies of degradation processes in SrBi2Ta2O9 thin films during hydrogen gas annealing"

  Mat. Res. Soc. Symp. Proc., 541, 287 (1999).

14

K.M. Lee, D. Thomas, Seung-Hyun Kim, J-P. Maria, A.I. Kingon, and H.M. Jang "Studies of electrical polarization fatigue in SrBi2Ta2O9 thin films"

  Mat. Res. Soc. Symp. Proc., 541, 241 (1999).

13

Seung-Hyun Kim, D-J. Kim, S.K. Streiffer, J-P. Maria, and A.I. Kingon, "Ferroelectric properties of SBT (Sr/Bi/Ta=0.8/2.3/2) thin films using a novel chemical solution deposition"

  Mat. Res. Soc. Symp. Proc., 541, 223 (1999).

12

Seung-Hyun Kim, D-J. Kim, J.G Hong, S.K. Streiffer, and A.I. Kingon, "Thermally induced imprint properties of chemical solution derived PLZT thin films"

 Integrated Ferroelectrics , 22, 133 (1998).

11

Seung-Hyun Kim, J.G. Hong, H.Y. Lee, J.C. Gunter, S.K. Streiffer, and A.I. Kingon, "The effects of RuO2/Pt hybrid bottom electrode structure and ferroelectric properties of sol-gel derived PZT thin films¡±

Mat. Res. Soc. Symp. Proc., 493, 131 (1998).

10

Seung-Hyun Kim, Y.S. Choi, D.Y. Yang, and C.E. Kim, "The effects of PbTiO3 thin template layer and Pt/RuO2 hybrid electrode on the ferroelectric properties of sol-gel derived PZT thin film"

Thin Solid Films, 325, 72 (1998).

9

Y.S. Choi, Seung-Hyun Kim, H.S. Song, C.E. Kim, D.Y. Yang, Y.C. Chun, J.H. Joo, J.M. Sun, and K.Y. Oh, "The ferroelectric properties of sol-gel derived PLZT thin film for high density FeRAM application"

J. Korea Phys. Soc., 32, S1687 (1998).

8

Seung-Hyun Kim, Y.S. Choi, Y.J. Oh, and C.E. Kim, "Preparation of Pb(Zr0.52Ti0.48)O3 thin films on Pt/RuO2 double electrode by a new sol-gel route"

  J. Mater. Res., 12(6), 1576 (1997).

7

Seung-Hyun Kim, Y.J. Oh, and C.E. Kim, "Influence of Al2O3 buffer layer on the crystalline structure and dielectric property of PbTiO3 thin film by sol-gel processing"

  J. Mater. Sci. Lett., 16, 257 (1997).

6

Seung-Hyun Kim, Y.J. Oh, and C.E. Kim, "Influence of Al2O3 diffusion barrier and PbTiO3 seed layer on microstructural and ferroelectric characteristics of PZT thin films by sol-gel processing"

 Thin Solid Films, 305, 321 (1997).

5

Hyun-Jung Woo, D-J. Choi, and G.H. Kim, "Tilt-axis effect on oxidation behavior and capacitance-voltage characteristics of (100) silicon"

J. Mater. Sci., 32, 6101 (1997).

4

Yong Soo Choi, Soo Doo Choe, Seung-Hyun Kim, Chang Eun Kim, and Doo Young Yang, "Characterization of PLZT on platinum electrodes for high density FRAM application"

  Mat. Res. Soc. Symp. Proc., 446, 337 (1997).

3

Min Hong Kim, Tae-Soon Park, Dong-Su Lee, Dong-Yeon Park, Hyun-Jung Woo, Jowoong Ha, Dong-Il Chun, and Euijoon Yoon, "Stress of platinum thin films deposited by DC magnetron sputtering using argon/oxygen gas mixture"

  Mat. Res. Soc. Symp. Proc., 441, 427 (1997).

2

Dong-Su Lee, Dong-Yeon Park, Min Hong Kim, Dong-Il Chun, Jowoong Ha, and Euijoon Yoon, "Characterization of platinum films deposited by a two-step magnetron sputtering on SiO2/Si substrates¡±

Mat. Res. Soc. Symp. Proc., 441, 341 (1997).

1

Dong-Yeon Park, D-S. Lee, Min Hong Kim, Tae-Soon Park, Hyun-Jung Woo, Euijoon Yoon, Dong-Il Chun, and Jowoong Ha, "(100) oriented platinum thin films deposited by DC magnetron sputtering on SiO2/Si substrates¡±

Mat. Res. Soc. Symp. Proc., 441, 335 (1997).