Title

Conference

60

Temperature Dependence of Electrical Properties and Piezoelectric Response of PZT Thin Films

ISIF2003,
4/5-8, 2004,
Bomun Lake Resort,
Gyeongju, KOREA

59

Piezoelectric Property Map of Pb(Zr,Ti)O Thin Films for MEMS Applications

58

The Study of La-Doped PZT Films Using LaNiO3 Electrode Deposited on Base-Metal Foils

57

Nanoscale Properties of Sol-Gel Derived Pb(Zr1-xTix)O3 Films as a Function of The Concentration

56

Fabrication and Characterization of Pb(Zr,Ti)O3 Thick Films for MEMs Applications

55

Fatigue, Imprint and Charge Retention Characteristics of PZT Thin Films for High Density FRAM Devices

54

Dielectric Properties of PZT and PLZT Films on Base-Metal Foils for Advanced Power Electronic Systems

53

Fabrication of Resistance Temperature Detection Wafer Using Giant-Grained Platinum Thin Films Deposited on Si Wafer

52

Orientation Control and Characterization of Giant Grains of Reactively Sputtered Platinum Films on Silicon and Sapphire Substrates

51

Charge Retention Characteristics of PZT Thin Films for High Density FeRAM Devices

50

Nanoscale Domains and Local Electromechanical Hysteresis in Ferroelectric Films Studied Via Scanning Force Microscopy

49

Revisit of Phase Transformation Kinetics in PZT Thin Films by Sol-Gel Method Using Scanning Force Microscopy

48

Thickness and composition dependence of piezoelectric properties of PZT thin films for MEMS devices

MRS2003 Fall Meeting,
12/1-5, 2003,
Boston, MA, USA

47

The dielectric characteristics of PZT/LNO films deposited on base-metal sheets for power electronic systems

46

Charge retention characteristics of PZT thin films for high density FeRAM devices

45

Kinetics of phase transformation of PZT thin films by sol-gel method using scanning force microscopy

44

Ferroelectric domain structure and local piezoelectric properties of sol-gel derived PZT films

43

Frequency-dependent electromechanical response in ferroelectric materials measured via piezoresponse force microscopy

42.

Enhanced figure of merit characteristics of PZT thin films for uncooled pyroeletric IR sensors

41.

High performance PZT thin films for piezo-sensors and uncooled IR detectors

10th EMF 2003,
8/3-8/8, 2003, Cambridge, UK

40

Ultra thin PZT films and Pt electrode for high density FeRAM devices

39

Dielectric and electromechanical properties of highly textured Pb(Zr,Ti)O3 thin films for piezo-MEMS devices

FMA-20,
5/28-31, 2003,
Kyoto, Japan

38

Characterization of sol-gel multi-coated thick PZT films on platinized silicon substrates for micro devices applications

37

Temperature dependence of the electromechanical properties of PZT thin films
36 Thickness effects on the pyroelectic properties of chemical solution-derived Pb(Zr0.3,Ti0.7)O3 thin films for PIR sensor devices
35 Piezoelectric properties of PZT films for micro-sensors and actuators ISIF2003,
3/9-12, 2003,
Colorado Springs>Colorado, USA.

34

Fabrication of isolated ferroelectric domains in nano-scale

33

Study on crystal structure of (111)-oriented Pt films using high resolution X-ray diffractometer

32

Scaling Issues of Pb(Zr,Ti)O3 Capacitor Stack for High Density FeRAM Devices

JKCF 4
8/21-23, 2002
Osaka, Japan

31

Electromechanical Properties of Pb(Zr,Ti)O3 Films for MEMS Applications

30

Scaling and performance issues of low temperature crystallized PZT thin films for high density FeRAM devices

IFFF 2002
5/28-6/1, 2002
Nara, Japan

29

Piezoelectric and ferroelectric properties of Pb(Zr,Ti)O3 films for MEMS applications

28

Heat-treatment induced ferroelectric fatigue of Pt/Sr1-xBi2+yTa2O9/Pt thin-film capacitors

27

Ferroelectric fatigue in sol-gel derived Pb(Zr0.4Ti0.6)O3 thin films having Pt bottom and PtOx top electrodes

26

Enhanced ferroelectric properties of low temperature crystallized PZT thin films for high density FeRAM devices

FeRAM 2001
11/19-21, 2001
Gotemba, Japan

25

Fatigue and imprint of integrated PZT and BLT capacitors for high density FeRAMs

24

A critical comparison of degradation phenomena in PZT, SBT, and BLT thin films for high density FeRAM devices

IMF10
9/3-7, 2001
Madrid, Spain

23

New chemical solution derived high quality PZT films for MEMS and IR sensor devices

22

Low voltage switching in Pb(ZrxTi1-x)O3 thin films

ISIF01
3/12-14, 2001
>Colorado Springs, Colorado, USA

21

Electrode structures for reliable Pb(ZrxTi1-x)O3 ferroelectric thin film devices

20

Electrical properties of PZT thin films prepared on giant grained platinum electrodes

19

Low voltage switching in Pb(ZrxTi1-x)O3 thin films

AMF3
12/12-15, 2000
Hong Kong

18

Effects of electrodes on the electrical properties of ferroelectric devices

1st AMEC
10/27, 2000 Japan

17

Giant grained platinum electrodes for ferroelectric devices application

12th IEEE-ISAF
7/30-8/2, 2000
Honolulu, Hawaii, USA

16

The effects of preferred orientation on ferroelectric properties of PZT thin films

15

Simple stacked electrode structure for high density ferroelectric memory devices

14

The effect of IrO2 thickness on ferroelectric properties of Pb(ZrxTi1-x)O3 thin films with IrO2/Pt hybrid electrodes

13

The reliable PZT thin film capacitors with IrO2/Pt hybrid electrode for high density nonvolatile memory devices

12

Piezoelectric properties of PZT thin film diaphragm structures

11

Spatial variation of ferroelectric properties in Pb(Zr0.3Ti0.7)O3 thin films studied by AFM

10

Preferred orientation control of platinum thin films deposited by dc magnetron sputtering using Ar/N2 gas mixture

MRS99
11/29-12/3, 1999
Boston, Massachusetts

9

Orientation effects in chemical solution derived PZT thin films on ferroelectric properties

8

Changes in preferred orientation of sol-gel derived Pb(Zr0.53Ti0.47)O3 thin films on Ti-free Pt(111)/SiO2/Si and Pt(200)/SiO2/Si substrates

7

Effects of platinum bottom electrode orientation on the microstructure, texture, and electrical properties of PbTiO3 thin films deposited by dc magnetron sputtering

6

Effects of the microstructure of platinum elelctorde on the oxidation behavior of TiN diffusion barrier layer

ISIF99
3/7-10, 1999
Colorado Springs, Colorado, USA

5

Characteristics of magnetron sputtered PbTiO3 thin films on orientation-controlled platinum bottom electrodes

ISIF98
3/1-4, 1998
Monterey, California, USA

4

Preferred orientation of ferroelectric thin films on orientation-controlled Pt bottom electrodes

3

Characterization of platinum films deposited by a two-step magnetron sputtering on SiO2/Si substrate

MRS96 Fall Meeting
Boston, Massachusetts, USA

2

Stress of platinum thim films deposited by dc magnetron sputtering using argon/oxygen gas mixture

1

(100) oritented platinum thin films deposited by dc magnetron sputtering on SiO2/Si substrates