Patterned metal films used for
                 micro heater, temperature sensor and substrates 

 Micro pattern of metal on silicon wafer can be made  by two method
                      -conventional ; lift off
                      -Inostek ; thermal oxide etching
 Line width of pattern ; > 10 §­  
 Depth of pattern : <2 §­
 Customized patterns are also available.

 Single crystal Pt films
 Thickness : >500nm
 Orientation : (111), (200), (220)
 Dimension :  <5mm