Coating of Metal Films
 Metal :  Ag, Ir, Ru, Ni, Cr, Ta, Ti, W, Al, Cu, Rh
 Nitride : TiN, TaN
 Metal Oxide : PtOx, IrO2, RuO2, TiO2, Ta2O5
 Hybride and Alloy : Pt/IrO2, Pt/PtOx, Ir/IrO2, TaAl, TiW

* Customized specification is available
* Standard substrates are 4Ħħ or 6Ħħ silicon wafers
* Substrate can be varied upon request.

Coating of Oxide Films
 PZT, PLZT, PNZT, PT, SBT, BLT, etc.

Top Electrode Coating for Electrical Measurements
Thickness of Pt electrode can be varied upon request.
     (The price varies according to the thickness of Pt film.)